Plasma surface treatment machine Tetra 320R

PC-controllableautomaticlaboratory

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tretra 320R low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 320 litres of this plasma system offers enough space to serve series production / automation. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings Main features: Floor-standing enclosure Vacuum chambers: Aluminium Chamber volume: approx. 45 litres Gas supply: Mass Flow Controllers (MFCs) Generator frequencies: 80 kHz (0 - 100 W)/(0 - 3000), 100 kHz (0 - 500 W), 13.56 MHz (0 - 300 W), 2.45 GHz (0 - 850 W) Controls: Basic PC control (Windows CE), Full PC control (Windows 10 IoT) Pressure measurement: Pirani, capacity manometer The Tretra 320R plasma systems are mainly used in the following areas: Analytics, archaeology, automotive, research and development departments, semiconductor technology, small batch production, plastics technology, medical technology, microsystems technology, sensor technology, sterilisation, textile technology