UHV vacuum chamber VC M800²

for surface analysis

The VC M800² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. This system has great benefits: ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Colour of your choice possible by anodising ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ No welding required, parts can be easily attached Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 800 mm Height: 800 mm Volume approx. 640 liters Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position Door Hinged door with sight glass Diener electronic not only offers pioneering solutions in vacuum chambers, but also: Low pressure plasma systems for surface treatment Atmospheric pressure plasma systems for surface treatment Parylene coating systems Complete vacuum systems and equipment for a wide range of applications Test inks for determining surface tension Plasma indicators to prove successful plasma treatment Plasma generators