The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual, PC, and PCCE control is primarily intended for the following applications:
Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology
Basic equipment
Housing sizes vary depending on components/options
Chamber volume: depending on the version, 1.7 to 2.6 litres
Voltage supply 230 V
Gas supply
Needle valves
Mass flow controller (MFCs)
Vacuum chambers
Borosilicate glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
W6 (approx. ∅ 160 mm, L 180mm)
Charge
Product carriers: Aluminium panel, stainless steel, borosilicate glass
Electrodes
Single- or multi-tier
A pair of electrodes outside of the vacuum chamber
Controls
Manual
PCCE control (Microsoft Windows CE)
Rotary switch
Pressure measurement
Pirani
Timer
digital
analogue
Generators
Frequencies:
40 kHz: power 0 - 100 W
13.56 MHz: power 0 - 200 W
Additional options
Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.