The 10.5 litre LOW-COST PLASMA LAB SYSTEM ATTO with manual, PC, and PCCE control is primarily intended for the following applications:
small-series manufacture, analytics (SEM, TEM), medical engineering, sterilising, research and development departments, archaeology, textile technology, plastics technology
Housing
W 425 mm, H 275 mm, D 450 mm
W 525 mm, H 257 mm, D 450 mm
Vacuum chambers
made of glass (borosilicate)
∅ 211 mm, L 300 mm
Charge
Product carriers: Aluminium panel, stainless steel, borosilicate glass
Chamber volume
approx. 10.5 litres
Gas supply
2 gas channels via needle valve
MFC
Generator
40 kHz/200 W
13.56 MHz/300W
Vacuum pump
Capacity: min. 3 m3/h
Parts holding fixture
1 x product carrier
Controls
Manual
PCCE control (Microsoft Windows CE)
Rotary switch