Motorized High Vacuum Butterfly Valve used for Chip Production Industry
Electric Butterfly Valve Application
DCL electric motorized high vacuum butterfly valves are widely used on crystal growth furnaces, which are used for monocrystalline silicon wafer production. These valves can be zero leakage in very low pipe pressure, which is lower to 1.3*10-4Pa. Forged stainless steel body and special sealing structure design, to ensure valve’s long life cycles. Electric actuators are CSA/UL certificated and CE marked.
Sizes: DN50 to DN400
Electric Butterfly Valve Features
Concentric electric butterfly valve
Body type: wafer or lug
Body material: Ductile iron, SS304(CF8), SS316(CF8M)
Seat material: EPDM, PTFE, NBR(Buna-N) available
sure PN: Designed for commercial and industrial applications up to 200 psi
Stem design: Available in square shaft for easy mounting of actuators
Top flange: ISO 5211 direct mounting of actuators
One piece shaft: Maintains disc position.
Shaft pins: Enables a vibration free connection between the shaft and the disc..
O ring seal: Provides a seal to interior stem and bushings.