The perfect balance of high end performance and accessibility
RGA residual gas analysers
Our range of Residual Gas Analysers comes with three variants: whatever the one you select they are all simple and effective to operate, give you the comfort of a high performing and efficient RGA by your side.
Unique Benefits
Total pressure measurement
for full process control
Dual filament
for highest reliability and up-time
On unit display
for basic measurements without a PC
Customer replaceable parts
Degas function
Protection of Ion source and EM
All RGAs are equipped with a dedicated and easy to use software
It allows you to track your process in real-time from your laptop and do detailed analysis of up to 16 different units.
For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via a laptop.
RGAs do analysis of gases and their composition, this is needed for:
Leak detection and identification
Find and identify contaminants
Verify gas purity
Product/process quality assurance
Process & equipment diagnostics and control
Optimize process performance and yield
The perfect solution in a wide range of applications:
Semiconductor processes
Thin-film and display
Vacuum heat treatment
Vacuum freeze drying
Research & development
High energy physics
PRA primary gas analyser
Delivering the perfect balance of high end performance and accessibility.
Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range.