XY positioning stage EZ-0117 series

linear motor-driven2-axisair bearing

In the design of the XY Stage EZ-0117, particular emphasis was placed on a cost-conscious design combined with high accuracy requirements. The treads for the air bearings are covered with bellows to prevent the ingress of particles, making the EZ-0117 particularly suitable for particle-loaded applications. Despite being equipped with bellows, a high level of positioning accuracy is achieved. Iron-core synchronous motors allow acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. An interface plate is provided on the side of the cross table for the transmission of energy, signals and media. Both axes can be supplied separately with electrical and pneumatic energy. The end position is detected by inductive sensors. The XY Stage is available in 2 sizes, with a travel range of 250 x 450 mm or 250 x 800 mm. Other dimensions or extensions of the two-axis system are possible on request.