Tilt positioning stage EZ-0730 XYlinear motor-driven2-axis
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Characteristics
- Orientation
- XY, tilt
- Type
- linear motor-driven
- Number of axes
- 2-axis
- Other characteristics
- precision, high-speed, air bearing
- Stroke
500 mm, 850 mm
(19.685 in, 33.465 in)- Speed
500 mm/s, 1,500 mm/s
- Repeatability
20 nm, 40 nm
- Load
8 kg, 50 kg
(17.64 lb, 110.23 lb)
Description
Intelligent design gives the EZ-0730 stage maximum rigidity and excellent repeatability, minimizing axis crosstalk.
Built-in features:
Impulse decoupling to minimize crosstalk even at high accelerations.
Weight optimization by using carbon for the lower slide.
Use of carbon structures with thermal expansion close to 0 to minimize harmful temperature effects.
Extremely rigid chuck due to integrated flat 11-zone vacuum clamping device with high-precision tip/tilt adjustment using sophisticated pressure membrane technology.
Minimization of disturbance forces emanating from the energy chain due to novel drag chain concept.
Ironless drives and high-precision scales (Heidenhain LIP6 G0).
The machine bed is made of granite. The axes can be customized according to the customer’s requirements
VIDEO
Catalogs
EZ-0730
2 Pages
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.