XY positioning stage EZ-0745-ZCZ-axisrotarylinear motor-driven
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Characteristics
- Orientation
- XY, Z-axis, rotary
- Type
- linear motor-driven
- Other characteristics
- air bearing
- Stroke
5 mm
(0.197 in)- Speed
10 mm/s
- Load
10 kg
(22.05 lb)
Description
The EZ-0745 air-bearing ZC-axis is intended for integration into an XY-stage (e.g. EZ-0715). Due to the highly integrated design, only a low overall height of approx. 138 mm is required. The rotation angle is limited to ± 3°. A high repeatability of ± 1.5 μrad enables very precise alignment of the substrate. The Z-axis is secured against rotation via 2 air bearing pads and is dynamically driven by 2 opposing voice coils. An air-bearing pneumatic cylinder is integrated for weight decoupling. An individual, customer-specific adjustment of the Z-stroke is possible.
Catalogs
EZ-0745-ZC
2 Pages
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.