Linear motor-driven linear axis EZ-5504

precisioncompactadjustable

With the EZ-5504 focus axis, EIZENBERGER has implemented a completely new and innovative axis concept. The external features are compact dimensions of 99 x 99 x 80 mm (L x W x H) and a central, continuous opening of approx. 35 mm for optical components. The slip-stick-free air bearing enables maximum precision over the entire stroke range of 18 mm and repeatability in the nanometer range. In addition to the extremely low position error, the low tilt error of the axis is particularly noteworthy. The focus axis is permanently magnetically weight compensated and designed for a payload of 250 g. The weight compensation is adjustable for masses from 50 to 300 g. The focus axis can be moved dynamically via a voice coil motor. A Renishaw measuring head with a resolution of 1 nm and a BiSS-C interface is used as the measuring system. Applications: The focus axis is suitable for high-precision applications in the fields of lithography, mask exposure, scanning applications or generally for positioning optics and sensors. Due to the compact dimensions and the low system weight, the axis can be easily integrated into many applications. The air bearing and the materials used predestine the focus axis for clean room applications.