Air bearing rotary table EZ-0779

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The EZ-0779 rotary table with high axial load capacity and axial/radial error motion below 100 nm was originally developed for use in wafer processing; it is suitable for a wide range of applications. The direct- drive rotary table is equipped with a powerful water- cooled torque motor. Optionally, a rotary feedthrough with up to 6 air/vacuum channels can be integrated. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability. There are no restrictions regarding the installation position. Applications: Wafer grinding, wafer thinning, test systems, applications with high requirements on synchronization and/or positioning accuracy