Machining spindle EZ-8212

coolinggrindingmeasuring

The EZ-8212 spindle is equipped with a powerful torque motor (Tecnotion) and reaches speeds of up to 5,000 rpm. At high speeds, the air bearing must be cooled. For this purpose, there are four cooling channels in the rotor, which can be supplied via an external rotary union. The coolant inlet is located at the rear of the spindle, the outlet at the spindle nose; the exiting cooling water can thus be used to cool the substrate. The motor is cooled by a separate cooling circuit, both ports are located on the rear of the spindle. 2 channels for gaseous media (vacuum or compressed air) are fed to the spindle nose via an integrated rotary union. The spindle was developed for wafer grinding applications. A labyrinth seal ensures unimpaired operation in unclean environments. With a radial and axial motion error of less than 200 nm, the spindle is suitable for a wide range of high-precision machining processes. The spindle is equipped with an incremental angle measuring system (Heidenhain TTR ERM) with 512 lines. There are no restrictions regarding the mounting position. Applications: Wafer processing, in test systems, applications with high concentricity requirements.