Air bearing pad EZ-0472

The EZ-0472 bearing pads are self-preloading – thanks to an integrated vacuum zone – and possess a high level of inherent stiffness. External preloading is not required. The vacuum zone must be supplied with vacuum. Vacuum air bearings are characterized by high positional stability in both the axial and lateral directions. Due to the vacuum zone, the space requirement is larger than for an ordinary bearing with the same load capacity. This type of bearing is used in the electronics industry, chip production and the optical industry, among others. We develop and manufacture vacuum air bearing pads according to customer-specific requirements.