Gas pressure regulator and reducer TESCOM™ 12

membranestainless steellow-pressure

12 Series is a miniature ultra high purity IGS/VCR® pressure reducing regulator. The 12 Series offers 5 Ra or 10 Ra microinch finishes, tied diaphragm and internally springless and threadless design. It provides inlet pressures of 150 psig / 10.3 bar, outlet pressure from 250 mm Hg-15, 30, 60, 100 psig / 250 mm Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to 120 SLPM. Ideal for use in OEM tools, gas boxes and low-pressure gas cabinets. Specifications Material -Diaphragm: Hastelloy® -Seat: PCTFE -Valve Stem: Hastelloy® -Remaining Materials: 316L VAR Stainless Steel Flow Capacity -Standard: Cv = 0.04 -High Flow: Cv = 0.08 Weight -VCR®, IGS: 0.60 lb / 0.3 kg -A-Style: 1.08 lbs / 0.5 kg Additional Information -For custom modifications or a complete system solution, please contact your local sales office. Features -Product of choice for state-of-the-art OEM gas systems -Ultra-sensitive pressure control enhances MFC performance -Superior performance in a wide range of applications -Flows from 2 SCFM to 120 SLPM -Unsurpassed droop and repeatability in a micro component -Metal-to-metal diaphragm to body seal for high leak integrity -10 Ra or 5 Ra microinch internal surface finish -Meets SEMI F19 and SEMI Modular Interface specifications