Planargard® NMB Cartridge Filter
Sub 32 nm node CMP slurry filtration with leading edge of "Nanofiber Continuous Melt-blown" technology
Various retention ratings
Nanofiber CMB technology
Optimized graded depth structure
CDS and bulk filtration applications
Materials:
Membrane: Polypropylene
Support: Polypropylene
Cartridge o-ring: EPR, Silicon, 2-222
Product type:
NMB
Maximum operating conditions:
Maximum temperature: 80°C (176°F)
Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) @ 25°C (77°F)