Vaporsorb™ CSP-32 Chemical Air Filters
Advanced optics and resist protection
Highly activated carbon plus advanced polymetric media removes acids, bases and condensable organics in each filter cell
Pleated filter design in rigid, deep frames optimizes active component surface area for maximum utilization and efficiency
Low pressure drop enables serial filter layout and multiple levels of protection
Interstack sample ports and seriel filter arrangement allow filter performance monitoring without jeopardizing photoresist or exposed optical surfaces