Wafergard® Max 1000 In-line Teflon® Gas Filter
Superior particulate filtration for ultrapure gas applications - PTFE membrane
Large filtration area - 3X larger filtration, low pressure drop and high flow
Same length dimension as current filter generation, eliminating design changes of the gas panel or delivery system
Extended filter lifetime - 3X longer than earlier generation and reduced cost of ownership (COO)
Materials:
Hydrophobic PTFE membrane supported by molded Teflon® PFA structures
Housing: 316L stainless steel
O-ring: Encapsulated fluoroelastomer (E-FKM)
Surface finish interior:
≥25 µin Ra
Removal rating:
≥99.9999999% removal of ≥0.003 µm particles in gas
Downstream cleanliness:
< 0.03 particles/liter ( 0.01 µm
Maximum operating conditions:
Maximum inlet pressure: 9.8 bar (142 PSIG)
Maximum forward differential pressure: 3.9 bar (57 PSID)
Maximum reverse differential pressure: 2.5 bar (36 PSID)
Maximum operating temperature: 120°C (248°F)
Helium leak rating:
1 x 10 (-10) Pa.m³/sec
Warranty:
1 year