Gas purification system GateKeeper

Gas purification system - GateKeeper - Entegris
Gas purification system - GateKeeper - Entegris
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Description

GateKeeper® Gas Purification Systems GPS media series (HX, DX and Z2) deliver an array of purified gases in the parts-per-trillion (ppt) levels at a low cost of ownership Maximum flow rates ranging from 311 SLM to 932 SLM Applications include immersion lithography tools, semiconductor and LED production Purifiers automatically self-regenerate, guaranteeing a continuous flow of pure gas Compact design uses minimal fab floor space to ensure facility cost savings

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