VULCANO2 is our gantry stacked-axes architecture combining our renowned ironcore motors, mechanical bearing and high-end optical encoders to deliver great geometrical performance at high dynamics.
When compared to our stacked CHARON2 family, the VULCANO2 mainly comes with higher duty cycle and payload capabilities. Its compact footprint maximises cost efficiency without compromising throughput and duty cycles.
Whether standard or customised, VULCANO2 ensures consistent repeatability and accuracy, even during extended operation. This platform is ideal for applications that require precision, such as overlay metrology and flip-chip processes on large plates.
Characteristics
Up to 6 degrees of freedom
Built-in vacuum supply and customer signal cables at chuck level
Here are the key features
Nanometer position stability
Ensures precise positioning accuracy over extended periods.
ISO 2 clean room compatibility
Suitable for controlled environments with stringent cleanliness requirements.
Tip-Tilt correction with the Z3TM+ combined module
Enables precise adjustment for optimal positioning.
Coarse Z function with the Z3TM+ combined module
Additional 12 mm electric lifting mechanism to enable wafer loading and offloading.
Built-in vacuum supply at chuck level
Facilitates efficient operation by ensuring proper material handling.
Short move and settle times
Quick response and stabilization for enhanced productivity.