Stacked architecture positioning system VULCANO2
2/3-axisgantryfor wafer inspection and metrology

Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology
Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology
Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology - image - 2
Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology - image - 3
Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology - image - 4
Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology - image - 5
Stacked architecture positioning system - VULCANO2 - ETEL S.A. - 2/3-axis / gantry / for wafer inspection and metrology - image - 6
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Characteristics

Number of axes
2/3-axis
Features
gantry
Applications
for wafer inspection and metrology, for the semiconductor industry, for clean rooms
Other characteristics
compact, stacked architecture
Repeatability

1.5 µm

Load

80 kg
(176.37 lb)

Stroke

365 mm
(14.37 in)

Speed

0.1 m/s, 1 m/s, 1.2 m/s
(0.33 ft/s, 3.28 ft/s, 3.94 ft/s)

Description

VULCANO2 is our gantry stacked-axes architecture combining our renowned ironcore motors, mechanical bearing and high-end optical encoders to deliver great geometrical performance at high dynamics. When compared to our stacked CHARON2 family, the VULCANO2 mainly comes with higher duty cycle and payload capabilities. Its compact footprint maximises cost efficiency without compromising throughput and duty cycles. Whether standard or customised, VULCANO2 ensures consistent repeatability and accuracy, even during extended operation. This platform is ideal for applications that require precision, such as overlay metrology and flip-chip processes on large plates. Characteristics Up to 6 degrees of freedom Built-in vacuum supply and customer signal cables at chuck level Here are the key features Nanometer position stability Ensures precise positioning accuracy over extended periods. ISO 2 clean room compatibility Suitable for controlled environments with stringent cleanliness requirements. Tip-Tilt correction with the Z3TM+ combined module Enables precise adjustment for optimal positioning. Coarse Z function with the Z3TM+ combined module Additional 12 mm electric lifting mechanism to enable wafer loading and offloading. Built-in vacuum supply at chuck level Facilitates efficient operation by ensuring proper material handling. Short move and settle times Quick response and stabilization for enhanced productivity.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.