Stacked architecture positioning system CHARON2HD

XY2-axislinear

HD stands for high dynamics. With CHARON2HD, dynamics of the existing base product are doubled without compromise on performance. As for the CHARON2 family, the HD versions come in a multitude of different predefined configuration ranging from single X axis to complete 6 degree-of-freedom (DOF) motion system. The choice from our standard electronics makes the CHARON2HD system scalable in performance to best meet the targeted specifications. Compared to CHARON2, the HD versions allows to double both speed and acceleration to reach dynamics of 2 m/s and 2g acceleration. Thanks to the standard mounting interface, this CHARON2HD can be considered as a drop-in upgrade to boost the throughput of CHARON2 application without any compromise on performance. Characteristics Compact footprint and design suitable for space-limited applications Up to 6 degrees of freedom Built-in vacuum supply and customer signal cables at chuck level Here are the key features: Nanometer position stability Ensures precise positioning accuracy over extended periods. Tip-Tilt correction with the Z3TM+ combined module Enables precise adjustment for optimal positioning. Coarse Z function with the Z3TM+ combined module Additional 12 mm electric lifting mechanism to enable wafer loading and offloading. Built-in vacuum supply at chuck level Facilitates efficient operation by ensuring proper material handling. Short move and settle times Quick response and stabilization for enhanced productivity.