Steel rotary axe DXRH
direct-drivehollowfor semiconductors

Steel rotary axe - DXRH - ETEL S.A. - direct-drive / hollow / for semiconductors
Steel rotary axe - DXRH - ETEL S.A. - direct-drive / hollow / for semiconductors
Steel rotary axe - DXRH - ETEL S.A. - direct-drive / hollow / for semiconductors - image - 2
Steel rotary axe - DXRH - ETEL S.A. - direct-drive / hollow / for semiconductors - image - 3
Steel rotary axe - DXRH - ETEL S.A. - direct-drive / hollow / for semiconductors - image - 4
Steel rotary axe - DXRH - ETEL S.A. - direct-drive / hollow / for semiconductors - image - 5
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Characteristics

Material
steel
Type
direct-drive
Configuration
hollow
Product applications
for semiconductors
Other characteristics
precision
Torque

1.51 Nm, 2 Nm, 14.9 Nm
(1.1137 ft.lb, 1.4751 ft.lb, 10.9897 ft.lb)

Diameter

53 mm
(2.09 in)

Length

228 mm
(8.976 in)

Description

Our latest rotary axis solution, the DXRH, 1 degree of freedom (DOF) mechanical bearing design, is characterised by exceptional accuracy. The DXRH is characterised by its encoder system and unrivalled mechanical properties comparable to those of air bearing solutions – without the associated complexity. Supported by HEIDENHAIN best in class encoder and bearing technology and our toothless direct drive motor, the DXRH ensures precise performance without torque ripple. Full compatibility with our standard interfaces enables seamless integration and performance upgrade without the need for redesign. Characteristics Bidirectional repeatability: ±0.25 arcsec Position accuracy down to ±3 arcsec (w/o calibration) Position stability: ±2,5 marcsec Radial runout: ±1 µm Total axial error: ±2 µm” Here are the key features: Infinite Theta Rotation The DXRH offers continuous rotation for versatile positioning. Ultra-High Resolution Encoder With 360,000 lines, it delivers precise feedback for accurate motion control. Payload Capacity Capable of handling payloads up to 12.5 kg, ensuring versatility for various applications. Vacuum Compatibility Equipped with vacuum feed-through and purge for axis cleanliness, ideal for sensitive environments. Cleanroom Compatibility ISO Class 1 cleanroom compatibility ensures reliable performance in controlled environments. Modular Options Several options available, including modular external hard stop, wobble kit, wafer vacuum, and connector support, enhancing customization and flexibility. Toothless Motor Technology Utilizing toothless motor technology, the DXRH ensures high-speed stability with zero cogging.

Catalogs

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.