UL1000 Fab
Dry Helium Leak Detector UL1000 Fab
A new Dimension in Stability and Responsiveness on Leaks down to 10 -12 atm/css. The INFICON UL1000 Fab Mobile Helium
Leak Detector is specifically designed to meet the requirements of semiconductor applications. Making ease of use, leak detection efficiency and mobility within the fab environment system priorities, the UL1000 Fab provides an extremely fast leak rate response across all measurement ranges.
The UL1000 Fab offers never before seen leak rate stability down to < 5×10-12 atm cc/s through an optimised vacuum architecture that combines high helium pumping speed and high inlet pressures. Proprietary software, I-CAL (Intelligent Calculation Algorithm of Leak Rates), allows you to forget long response times in low leak rate ranges as the UL1000 Fab responds quickly to all leak rate ranges.
With the addition of the TC1000 Test Chamber accessory, the UL1000 Fab Helium Leak Detector provides easy, fast and accurate testing of hermetically sealed parts like IC packages, quartz crystals and laser diodes (according to MIL-STD 883, Method 1014).
Features
wide measurement range over 15 decades
short pumpdown and response time
mobile all-metal housing for added convenience with uncompromised maneuverability
I-CAL to ensure fastest response time to leaks in all measurement ranges
zero function with automatic integration time alignment for fast and reliable test results
intelligent vacuum design with rugged scroll pump and multiple inlet turbomolecular pump that provides high helium pumping speed with high compression