Capacitance diaphragm vacuum gauge CDG045D2
with ceramic sensorwithout display

capacitance diaphragm vacuum gauge
capacitance diaphragm vacuum gauge
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Characteristics

Technology
capacitance diaphragm, with ceramic sensor
Display
without display
Vacuum range

Max.: 1,100 mbar
(15.95415115 psi)

Min.: 1 mbar
(0.014503774 psi)

Description

CDG045D2 INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface. The innovative heating concept enables a cool to the touch surface and saves valuable tool space. INFICON Edge is the smallest vacuum measurement instrument of its kind. Benefits Compact, saves valuable tool space Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points Easy one push button or remote signal zero command, zero offset adjustable Diagnostic port for quick service and maintenance Two year warranty, longer life time with advanced heating concept and gauge protection No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications Compliance & standards: CE, EN, UL, SEMI, RoHS Typical Applications CVD, Etch, PVD and other semiconductor production processes

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