Optical profilometer 35 nm - 3 µm | F42

for thin-film analysis

The Filmetrics F42 can map the thickness of films, such as OSP, at over one-million points, each with a spot size as small as 3 microns. Using an integrated CCD camera, live video makes it easy to pinpoint exact measurement locations. Once the feature is in the field of view, simply draw a box around it to analyze it. Pixel-Width Spot Size Thickness measurement is made at every single pixel displayed, yielding spot sizes as small as 3 microns. This allows measurements to be made in even the narrowest of channels and cavities. Mapping Uniformity can be checked on these structures with the F42 system's mapping capability. With one click, over a million individual thicknesses can be calculated and displayed in an easy-to-read gradient map. Average thickness and other statistics are automatically reported while notifying the user of any out-of-range thickness measurements. Using goodness-of-fit criteria, the features of interest can be mapped while excluding all other areas