Wafer microscope MPS150

opticalfor surface inspectionbinocular

Customize your 150 mm probe station based on flexible modules at an incredible price! FormFactor introduces a new modular concept for its best-in-class 150 mm probe stations. This will make it even easier to configure your individual probe solution for current and future needs at an incredible price. Simply choose a base station and add as many application-specific starter kits as you need. Coax – DC parametric test down to pA levels • Movable platen with 40 mm height adjustment, 200 μm contact / separation stroke and ± 1 μm repeatability • Chuck stage with adjustable friction & stage lock, unique Z chuck adjustment and 90 mm pull-out • Magnetic positioners with 1 μm feature resolution and 3 linear axes with precision ball bearing Triax – Low-noise measurements down to fA levels • Stereo microscope: 15x–100x magnification with large field-of-view and camera-ready c-mount • Four triax probe arms and high-quality triax cables • Light/EMI shielding (optional) • Upgrade option for fF-level measurements • TRIAX chuck with ±8 fine theta chuck rotation, three auxiliary areas, chuck surface with ±5 μm planarity for consistent contact force and overtravel • East/West to North/South measurements with single setup RF test up to 67 GHz • Three probe technologies available: Infinity Probe, ACP Probe, |Z| Probe • Matching cables and substrates included • RF chuck ±3 μm surface planarity • Unique 200 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact • WinCal XE Calibration Software