Temperature measurement system IMS-K-DC

for wafers

Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight SPA for On-wafer DC Parametric Measurements FormFactor and partner Keysight applications experts will help you configure a robust, complete solution, including: • FormFactor probe system: CM300xi, SUMMIT200, MPS150 (others available) • Manual, semi-automatic and fully automatic probes station options • FormFactor analytical probes: DCP probes (others available) on manual or motorized positioners • FormFactor DC automation software: Autonomous DC Measurement Assistant for unattended probing over temperature on small pads • Full over temperature measurements and automation from -60°C to +300°C • Keysight semiconductor parameter analyzer and/or PXIe SMUs: B1500A (others available) • Keysight automation and modeling software: WaferPro XP, PathWave, IC-CAP • To complete the system: cables, adapters, mounting hardware, etc. Industry’s Most Productive and Accurate DC Parametric Measurement System DC parametric measurements are important contributors to decisions made at each stage of semiconductor product development and production, for nearly every device type and semiconductor technology. They play a key role in advanced materials research, process characterization, device characterization and modeling, design debug, process monitoring, and production wafer sort. Accurate and repeatable DC parametric measurements (IV, CV, pulsed, and high-power) reduce uncertainty.