Wafer measurement system EPS200MMW

microscope

A complete solution for mmW, THz and load-pull measurements at 67 GHz and beyond. Tailored solution that addresses measurement needs for active and passive components through the terahertz frequency range. It enables the highest dynamic range and directivity—all without compromising electrical accuracy or mechanical stability. The EPS200MMW is a dedicated probing solution that comes with everything needed to efficiently achieve accurate measurement results, incorporating best-known methods and design concepts for probing up to THz frequencies.With a solid cast frame and a platen with four-point support, the EPS200MMW delivers excellent stability, making it easy to achieve high accuracy. Its polished granite base eliminates any thermal or mechanical influences, ensuring excellent planarity and system stability. An integrated vibration isolation solution and an optional vibration-isolation table maintain high-quality contacts throughout measurements.The unique SIGMA™ options seamlessly integrate mmW heads and load pull tuners from leading measurement instrument suppliers, enabling the highest dynamic range and directivity without compromising electrical accuracy and mechanical stability. The SlimVue™ microscope mitigates mechanical interference for high-magnification optics required for smallpad probing