3D measurement system MicroProf® FEfor wafers
Add to favorites
Compare this product
Characteristics
- Technology
- 3D
- Measured material
- for wafers
Description
The FRT MicroProf® FE is FormFactor’s standard, fully automated 2D/3D wafer metrology tool. It combines the capabilities of the established MicroProf 300 with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and almost maintenance-free hardware components, providing high throughput inspection, the MicroProf FE is the metrology solution in any front end HVM fab.
Besides the standard configuration, the FRT MicroProf FE can be equipped with numerous additional features, which can also be retrofit later.
VIDEO
Catalogs
No catalogs are available for this product.
See all of FORMFACTOR‘s catalogs
Related Searches
- Measuring machine
- Optical measuring machine
- Automatic measuring machine
- Laser scanning system
- High-precision measuring machine
- 3D measuring machine
- Compact measuring machine
- Thickness measurement system
- Calibration measuring machine
- High-speed measuring machine
- Rugged measuring machine
- Shape measuring machine
- High-resolution measuring machine
- Temperature measurement system
- Wafer measurement system
- Roughness measuring machine
- Fully-automatic measuring machine
- Flatness measuring machine
- Automated scanning system
- Non-destructive measuring machine
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.