Concentration gauge FUD-1-12, FUD-1-1006

FUD-1 Model-12(Semi./LCD) remains the same advantages as Model-12.It also features a cell type sensor for Semiconductor / LCD productions. The cell type sensor is very small, and the material is PFA to apply to requirement from Semiconductor / LCD productions. Small cell type transducer No contamination [Material : PFA] No periodical replacement required Advantages High accuracy and stability Almost fee meintenance Easy installation Easy operation Appiactions Hydroperoxide in CMP slurry Dilution control for H2O2, TMAH, HNO3, H2SO4, HCl, etc. Concentration monitoring of HF, NH4OH, KOH, IPA, etc. Etch rate monitoring of HF, H2SO4, etc. Principle The ultrasonic velocity in a liquid is determined by concentration and temperature.FUD-1 measures the velocity and the tempearture accurately,and calcurates the concentration of the liquid from the velocity and the tempearture with the calibration curve stored in the data ROM.