The High Resolution Electronic Flow Control Valve is the next-generation of flow control valves designed to meet the needs of the semiconductor industry. Using a servo motor and optical position sensor, it delivers ultra-high resolution and repeatability with low leakage rates for leak and purge applications. With a single seat design and no differential pressure, the High Resolution Valve provides superior performance over legacy needle valves.
The high resolution electronic flow control valve
The High Resolution Electronic Flow Control Valve is a single-seat design, which means no differential pressure is required to actuate the valve. The servo motor and optical position sensor allow for ultrahigh resolution, repeatability and low leakage rates for leak and purge applications.
The High resolution valve is the next-generation of flow control valves designed to meet the needs of the semiconductor industry.
The High Resolution Valve is the next-generation of flow control valves designed to meet the needs of the semiconductor industry. Using a servo motor and optical position sensor, it delivers ultra-high resolution and repeatability with low leakage rates for leak and purge applications. With a single seat design and no differential pressure, the High Resolution Valve provides superior performance over legacy needle valves.
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The high resolution valve contains numerous patented innovations.
The high resolution valve contains numerous patented innovations that make it unlike anything else in the marketplace today.
In particular, our design provides an unprecedented level of accuracy and control for flow rate,