Specification
• XY Axis Moving Range : 600mmx800mm
• Z Axis Moving Range : 200mm
• Camera : 20MP Black and White
FOV
• Wide field of view measurement mode : 600mm×800mm
• High-precision measurement mode : 530mm×730mm
• Magnification : Lens 0.7X-4.5X,Monitor magnification :30X-240X
• Max Height of Measured Part : 200mm
• Resolution : 0.1 μm
Measuring accuracy
Wide field of view measurement mode
• Stage fixed(not moving) : ±3.0μm
• Stage Moving : ±(5+0.05L)μm
High-precision measurement mode
• Stage fixed(not moving) : ±1.5μm
• Stage Moving : ±(2.8+0.05L)μm
Repeat accuracy
Wide field of view measurement mode
• Stage fixed(not moving) : ±1.0 μm
• Stage Moving : ±2.0μm
High-precision measurement mode
• Stage fixed(not moving) : ±0.5μm
• Stage Moving : ±1.5μm
• Z-axis Measurement range (not moving) : ±3.5mm
Z-axis measurement accuracy
• Stage fixed(not moving) : ±2μm
• Stage Moving : ±(6.0+L/100)μm
• Max Number of Measurable Positions at One Time : 500
• Max Number of Measurable Parts at One Time : 200pcs
Function
• Automatic Testing : Place and measure with one key, automatically identify measurement positions, automatic testing, automatically determine the result YES or NO
• Arbitrary Placement of Products : Supports arbitrary placement, can search for the measurement target
• Scanning Function : Scan and read the QR code on the inspection report to read the setting file, avoiding program errors
• Data Storage : Measurement results and test date/time/batch number information are automatically saved
• Data Output : Create inspection result reports and statistical reports with one key