High-sensitivity Si APD for detection of light with a wavelength of 266 nm
The S14124-20 is an improved Si APD from the S8664 series for high sensitive detection of light with a wavelength of 266 nm used in semiconductor inspection and laser processing equipment. We have achieved a quantum efficiency of 87% at λ=266 nm.
Features
- High sensitivity, quantum efficiency: 87% (λ=266 nm)
- Low capacitance
- Low noise
- High gain
Specifications
Type : Short wavelength type
(low terminal capacitance)
Photosensitive area : φ2.0 mm
Package : Metal
Package Category : TO-8
Peak sensitivity wavelength (typ.) : 600 nm
Dark current (max.) : 10 nA
Cutoff frequency (typ.) : 250 MHz
Terminal capacitance (typ.) : 11 pF
Breakdown voltage (typ.) : 400 V
Temperature coefficient of breakdown voltage (typ.) : 0.78 V/℃
Gain (typ.) : 400
Measurement condition : Typ. Ta=25 ℃, unless otherwise noted