The Optical NanoGauge Thickness measurement system C10323 is a microscopic thickness measurement systems. Objects with irregular surfaces that would produce high level of scattered light cannot be measured at the macro level. For these types of objects, measuring a small area reduces scattered light making measurement possible.
The power supply voltage of C10323-02 is AC100 V to AC120 V.
Features
• Thickness measurement in micro field of view
• High speed and high accuracy
• Analyze optical constants (n, k)
• External control available
Specifications
Type number : C10323-02
Measurable film thickness range (glass) : 20 nm to 50 μm①
Measurement reproducibility (glass) : 0.02 nm②
Measurement accuracy (glass) : ±0.4 %③
Light source : Halogen light source
Measurement wavelength : 400 nm to 1100 nm
Spot size : φ8 μm to φ80 μm④
Working distance : Refer to objective lens list
Number of measurable layers : Max. 10 layers
Analysis : FFT analysis, Fitting analysis, Optical constant analysis
External control function : RS-232C, PIPE, Ethernet
Interface : USB 2.0
Power supply : AC100 V to AC120 V , 50 Hz/60 Hz
Power consumption : Approx. 250 VA