MEMS mirror S13124-01

squarelaserdeflection

Miniature, high performance, linear mode Electromagnetically driven two-dimensional laser scanning MEMS mirror The S13124-01 is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. A two-dimensional scanning was achieved in linear mode. Electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity. Features - Two-dimensional scanning in linear mode Capable of vector scanning and step operation - Compact - Low voltage drive: suitable for installation on equipment - With window material: Prevents foreign matter contamination - Evaluation circuit available: C15087 (sold separately) Specifications • Type : 2-axis linear scan • Operation mode : First axis: Linear mode • Second axis: Linear mode • Mirror size : φ1.95 mm • Mirror material : Aluminium • Optical deflection angle : First axis: ±10° • Second axis: ±10 ° • Drive frequency (max.) : First axis: 90 Hz • Second axis: 90 Hz