MEMS mirror S13989-01H

squarelaserdeflection

Miniature, high performance Electromagnetically driven two-dimensional laser scanning MEMS mirror The S13989-01H is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. High reliability was achieved by employing a hermetic seal package. Electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity. Features - Low current operation - Ultra-miniature size - Wide optical deflection angle Specifications Type : 2-axis raster scan Operation mode : Fast axis: Non-linear mode (resonant mode) Slow axis: Linear mode Mirror size : φ1.23 mm Mirror material : Aluminium Optical deflection angle : Fast axis: ±20° Slow axis: ±12 ° Drive frequency (max.) : Fast axis: 29.3 kHz (typ.) Slow axis: 100 Hz