Photodiodes for electron beam detection
Photodiodes for detecting backscattered electrons in scanning electron microscopes (SEM).
S11141-10
High sensitivity, direct detection of low energy (1 keV or more) electron beams
Features
-Direct detection of low energy (1 keV or more) electron beams with high sensitivity
-High gain: 300 times
high detection efficiency: 72 % (incident electronenergy: 1.5 keV)
-Large photosensitive area size: 10 × 10 mm
-φ2.0 mm hole in center of photosensitive area
-Thin ceramic package
-Uses a wiring board made of less magnetic materials
S11142-10
High sensitivity, direct detection of low energy (1 keV or more) electron beams
Features
-Direct detection of low energy (1 keV or more) electron beams with high sensitivity
-High gain: 300 times
high detection efficiency: 72 % (incident electronenergy: 1.5 keV)
-Large photosensitive area size: 14 × 14 mm
-φ2.0 mm hole in center of photosensitive area
-4-element photodiode
-Thin ceramic package
-Uses a wiring board made of less magnetic materials