Cabinet furnace LPoxidation
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Characteristics
- Configuration
- cabinet
- Function
- oxidation
Description
This machine is designed to improve the cell efficiency by applying a passivation layer on the front side of the silicon wafer after Edge Isolation and PSG removal.
Spec
High Throughput: 14,400 wafers/hr (2,400 wafers/boat)
Cycle Time: 60min
Uptime: 99%
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.