Chamber oven

dryingcleaninggas

It is an oven for heating, drying, and burning of the OLED plate with the IR heater, and its main purpose during the OLED manufacturing process is burning and drying after cleaning. This equipment holds the greatest market share in the world as it is the most suitable for the OLED burning process. Due to the use of the IR heater and air distribution system with excellent performances, it is possible to realize high precision temperature control and outstanding outgassing, and other strengths of this equipment include the high purity level (class 10), maintainability, small installation place, low operating cost, etc. In addition, the latest process technology trend, O2 concentration control, can be implemented.