Vertical automatic storage system

cassettefor plateswith constant temperature and humidity control

This auto storage system is for the clean logistics system for semiconductors, which stores and sorts the wafer FOUP, FOSB, POD, and cassette. It can be implemented in various types of forms such as a chamber type, rack type and others that suit the required specifications of different semiconductor processes. Spec Environment Cleanness: Class1 ~ Class1000 Velocity: 1.5m/sec Acc/Dec: 2.5m/sec² Vibration: Not greater than RMS 0.5 G Purge: PN2 purge at all times Environment Control: Humidity, Temperature, Pressure, oxygen concentration