A Residual Gas Analyser configured for demanding UHV applications
The Hiden RGA for UHV are designed and configured for residual gas analysis in demanding UHV applications where critical measurements at UHV are required.
Residual gas analysis
Leak detection
Desorption
Outgassing studies
Bakeout cycles
Pump performance
Process gas contaminants
The HAL 201 RC analyser includes, as standard, gold plated versions of all ion source types. The gold plated ion source is provided to minimise source outgassing, suited for applications where total pressure is < 5 x 10-10 mbar.
EPICS is the standard instrument control software used in many light sources around the world and the Hiden HAL system is fully compatible with EPICS software drivers.
Gold plated ion sources to minimise source outgassing
Electron impact ioniser with twin oxide coated Iridium filament
Dual Faraday/channeltron electron multipler detector
Minimum detectable partial pressure of 5 x 10-14 mbar
Maximum operating pressure of 1 x 10-4 mbar