Mass spectrometer HALO 201 MBE

processmonitoringfor gas analysis

A gas analysis system for molecular beam epitaxy applications The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey. Semiconductor production Fuel cells The MBE specific analyser is constructed from compatible materials and designed for prolonged use in MBE environments and includes, as standard, molybdenum wiring in place of copper and a contamination resistant ion source shroud. Molybdenum wiring in place of copper wiring to improve RGA system lifetime in MBE environments Contamination resistant ion source shroud Dual Faraday/channelplate electron multiplier Minimum detectable partial pressure to 2 x 10-13 mbar Thermal extender option for RGA operation during bakeout