To customize the ultrahigh vacuum (UHV) chamber, contains the spherical chamber, cylindrical chamber and square chamber, all they are applied in ultrahigh vacuum (UHV) environment. CF flange sizes are available from CF16 to CF200. If you need bigger or special specifications of the CF cubes, please contact us and provide the drawing. Htc Vacuum will customize accordingly.
CF100, CF200 rectangle UHV chamber
Material:S.S.304
Surface: Electro-polished
Spec: CF200 cylinder UHV chamber
Leakage rate: 2 x 10-10mbar.l/sec
Operation pressure<7.5 x10-10 torr
When the total pressure is below 1 x10-9 torr, partial pressure of above 45amu is <0.1%.
16” spherical customized UHV chamber
Material:S.S.304
Surface: Electro-polished
Spec: 16” spherical UHV chamber
Leakage rate: 2 x 10-10mbar.l/sec
Operation pressure<7.5 x10-10 torr
Flange concentricity < 0.2゚
Cylinder customized UHV chamber
Material:S.S.304
Surface: Electro-polished
Spec: CF200 cylinder UHV chamber
Leakage rate: 2 x 10-10mbar.l/sec
Operation pressure<5 x10-10 torr
flange concentricity < 0.2゚