Automatic sample preparation system ArBlade 5000

for SEMion beam millingcooling

The most advanced broad ion beam system for producing exceptionally high-quality cross-section or flat-milling samples for electron microscopy. The ArBlade 5000 is equipped with a fast-milling Ar ion gun with a milling rate twice as high for cutting-edge performance, thus dramatically reducing the processing time for cross-section preparation. *1Si protrudes 100 um from the mask edge. Comparison of cross-section milling (Specimen: lead for mechanical pencil, Milling time : 1.5 hours) Cross-section widths up to 8 mm! For large-area milling requirements such as electronic-device applications, a revolutionary cross-section milling holder design has been developed for wider-area fabrication. Example of wide-area cross-section milling (Specimen: electronic component, Milling time: 5 hours) Hybrid Model: Dual-Milling Configuration Available The all new ion-milling system is equipped with both cross-section milling and flat milling modes for the most complex application needs. Equipped with multiple holders, the ArBlade 5000 system accommodates a wide range of applications. Cross-section Milling Used to produce wider, undistorted cross sections without applying mechanical stress to the sample Flat Milling Used for removing surface layer artifacts and final polish after traditional mechanical polishing techniques. Cryogenic versions of the ArBlade 5000 provide active cooling of the cross-section milling stage during sample processing. An integrated liquid nitrogen dewar connected to the cross-section stage effectively removes heat induced during ion-beam milling from the shielding mask and sample.