HIWIN direct drive rotary tables are ready-to-install rotary axes that can be incorporated directly into the machine concept without the need for any design work. The maintenance-free direct drives they use ensure that the rotary axes deliver high-torque performance with exceptional accuracy. Thanks to the range of encoder interfaces provided, the direct drive rotary tables can be integrated easily into all commercially available machine control systems and thus all existing machine concepts.
Ultra-flat rotary table with large hollow shaft. Used in semiconductor production and inspection, the extremely flat, dynamic and maintenance-free rotary axes are suitable for applications in which high positioning accuracy and synchronisation quality are required. The tilt-resistant, backlash-free design achieves a high torque density despite its low height. The high-resolution encoders are available as an incremental type or with an absolute interface. The large hollow shaft allows the passage of whole wafers up to 12 inches in size or applications with transmitted light. CAD data and technical data sheets are available for download.