Quadrupole Mass Analyzer
The MICROPOLE system is one of the smallest mass spectrometer systems making it easy to install. The system is proven to be an ideal solution for many chamber characterization applications. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced.
Extremely compact size and lightweight
1/20th size when compared to conventional residual gas analyzers making it easy to integrate to any system
High performance
Mini array of 9 quadrupoles gives excellent sensitivity at a fraction of the volume of traditional quadrupoles
High pressure operation
Can be used at up to 0.9Pa (7mTorr, 9 x 10-3mbar) resulting in the reduction or elimination of expensive vacuum pumping for many applications
Interchangeable sensor head in calibration
The sensor heads are pre-tuned and calibrated prior to shipment allowing the user to make sensor changes in the field without the need for fine tuning or technical expertise
Network sensors
Up to eight sensors can be monitored by a single PC using RS-485. PC-less scan operation by external I/O is also possible.
User friendly software
Micropole Scanner™ 2 software allows the user to monitor partial pressures of gases in various modes e.g. trend graph, spectrum graph, bar graph.