Spectroscopic ellipsometer

Horiba offers a large range of solutions for thin film quality control. Wide array of ellipsometer like in-situ and in-line are used in controlling processes in research and in industry. From thin film monitoring to large area mapping and in-line characterization of flexible devices. In-situ spectroscopic ellipsometers permits real-time monitoring and controlling of thin film deposition with a sub-monolayer resolution. It provides real-time estimation of film thickness and optical constants.