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Thermal mass flow controller SEC-8000F/D/E seriesfor gasdigital
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Characteristics
- Technology
- thermal mass
- Fluid
- for gas
- Other characteristics
- digital
- Flow rate
Max.: 150 l/min
(39.62581 us gal/min)Min.: 3 l/min
(0.79252 us gal/min)- Pressure
Max.: 3 bar
(43.5 psi)Min.: 1 bar
(14.5 psi)
Description
The SEC-8000F/D Series from HORIBA STEC is an ideal choice for anyone needing a digital mass flow controller with a fairly high accuracy. This controller features an accuracy of ±1.0% S.P and can be operated in high temperatures.
It is a clean gas supply unit that can be used for analysis of extremely small gas flows at the ppt lever. It complies with RoHS and can be used in semiconductor and compound semiconductor processing.
Catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.