The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.
HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:
A liquid mass flow meter for flow rate measurement,
A high temperature mass flow controller for measurement of vapor flow rate,
Valves, filters, heaters, etc.
Features
Compact size
Can be installed in a variety of positions
Best-selling TEOS vaporization system models
Combines SEF or LF, and digital control is possible
No need for a special bubbling tank or vaporization tank
Line-up of DeviceNetTM model
RoHS Compliance.