The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. When combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system.
Benefits:
Ultraclean due to an all metal construction
Wide flow range: from 1 CCM to 50 LM
High temperature models are available (PV-1000S/2000S)
Pressure control from an external unit