The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its' cost reduction capabilities in your process.
*1 Excluding SEC-N17X Series.
Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM
Wide variety of communications and power supply
High S.P. accuracy: +/- 1.0% S.P. (*1)
1 second high speed responce (*1)
Multi-gas, multi-range solution